* File: sky130_osu_sc_18T_ms__xor2_l.pex.spice * Created: Thu Oct 29 17:32:13 2020 * Program "Calibre xRC" * Version "v2020.2_35.23" * Nominal Temperature: 27C * Circuit Temperature: 27C * .subckt PM_SKY130_OSU_SC_18T_MS__XOR2_L%GND 1 2 23 27 29 39 43 49 51 r66 49 51 0.950071 $w=3.05e-07 $l=2.04e-06 $layer=MET1_cond $X=0.34 $Y=0.152 + $X2=2.38 $Y2=0.152 r67 43 44 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.605 $Y=0.152 + $X2=0.69 $Y2=0.152 r68 37 39 33.9251 $w=1.68e-07 $l=5.2e-07 $layer=LI1_cond $X=2.44 $Y=0.305 + $X2=2.44 $Y2=0.825 r69 30 44 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.775 $Y=0.152 + $X2=0.69 $Y2=0.152 r70 25 44 3.51065 $w=1.7e-07 $l=1.53e-07 $layer=LI1_cond $X=0.69 $Y=0.305 + $X2=0.69 $Y2=0.152 r71 25 27 33.9251 $w=1.68e-07 $l=5.2e-07 $layer=LI1_cond $X=0.69 $Y=0.305 + $X2=0.69 $Y2=0.825 r72 23 37 3.51065 $w=1.7e-07 $l=1.53e-07 $layer=LI1_cond $X=2.44 $Y=0.152 + $X2=2.44 $Y2=0.305 r73 23 29 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=2.44 $Y=0.152 + $X2=2.355 $Y2=0.152 r74 23 43 10.013 $w=3.03e-07 $l=2.65e-07 $layer=LI1_cond $X=0.34 $Y=0.152 + $X2=0.605 $Y2=0.152 r75 23 51 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.38 $Y=0.17 + $X2=2.38 $Y2=0.17 r76 23 49 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=0.34 $Y=0.17 + $X2=0.34 $Y2=0.17 r77 23 29 24.7492 $w=3.03e-07 $l=6.55e-07 $layer=LI1_cond $X=1.7 $Y=0.152 + $X2=2.355 $Y2=0.152 r78 23 30 9.25733 $w=3.03e-07 $l=2.45e-07 $layer=LI1_cond $X=1.02 $Y=0.152 + $X2=0.775 $Y2=0.152 r79 2 39 91 $w=1.7e-07 $l=3.1225e-07 $layer=licon1_NDIFF $count=2 $X=2.3 + $Y=0.575 $X2=2.44 $Y2=0.825 r80 1 27 91 $w=1.7e-07 $l=3.1225e-07 $layer=licon1_NDIFF $count=2 $X=0.55 + $Y=0.575 $X2=0.69 $Y2=0.825 .ends .subckt PM_SKY130_OSU_SC_18T_MS__XOR2_L%VDD 1 2 19 23 27 35 41 44 49 50 r45 49 50 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.38 $Y=6.49 + $X2=2.38 $Y2=6.49 r46 44 49 0.950071 $w=3.05e-07 $l=2.04e-06 $layer=MET1_cond $X=0.34 $Y=6.507 + $X2=2.38 $Y2=6.507 r47 44 53 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=0.34 $Y=6.49 + $X2=0.34 $Y2=6.49 r48 41 53 10.013 $w=3.03e-07 $l=2.65e-07 $layer=LI1_cond $X=0.605 $Y=6.507 + $X2=0.34 $Y2=6.507 r49 41 42 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.605 $Y=6.507 + $X2=0.69 $Y2=6.507 r50 35 38 110.909 $w=1.68e-07 $l=1.7e-06 $layer=LI1_cond $X=2.44 $Y=4.135 + $X2=2.44 $Y2=5.835 r51 33 50 3.51065 $w=1.7e-07 $l=1.52e-07 $layer=LI1_cond $X=2.44 $Y=6.355 + $X2=2.44 $Y2=6.507 r52 33 38 33.9251 $w=1.68e-07 $l=5.2e-07 $layer=LI1_cond $X=2.44 $Y=6.355 + $X2=2.44 $Y2=5.835 r53 30 32 25.6938 $w=3.03e-07 $l=6.8e-07 $layer=LI1_cond $X=1.02 $Y=6.507 + $X2=1.7 $Y2=6.507 r54 28 42 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.775 $Y=6.507 + $X2=0.69 $Y2=6.507 r55 28 30 9.25733 $w=3.03e-07 $l=2.45e-07 $layer=LI1_cond $X=0.775 $Y=6.507 + $X2=1.02 $Y2=6.507 r56 27 50 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=2.355 $Y=6.507 + $X2=2.44 $Y2=6.507 r57 27 32 24.7492 $w=3.03e-07 $l=6.55e-07 $layer=LI1_cond $X=2.355 $Y=6.507 + $X2=1.7 $Y2=6.507 r58 23 26 110.909 $w=1.68e-07 $l=1.7e-06 $layer=LI1_cond $X=0.69 $Y=4.135 + $X2=0.69 $Y2=5.835 r59 21 42 3.51065 $w=1.7e-07 $l=1.52e-07 $layer=LI1_cond $X=0.69 $Y=6.355 + $X2=0.69 $Y2=6.507 r60 21 26 33.9251 $w=1.68e-07 $l=5.2e-07 $layer=LI1_cond $X=0.69 $Y=6.355 + $X2=0.69 $Y2=5.835 r61 19 50 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1 + $X=2.175 $Y=6.355 $X2=2.38 $Y2=6.44 r62 19 53 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1 + $X=0.135 $Y=6.355 $X2=0.34 $Y2=6.44 r63 19 32 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1 + $X=1.495 $Y=6.355 $X2=1.7 $Y2=6.44 r64 19 30 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1 + $X=0.815 $Y=6.355 $X2=1.02 $Y2=6.44 r65 2 38 200 $w=1.7e-07 $l=2.81913e-06 $layer=licon1_PDIFF $count=3 $X=2.3 + $Y=3.085 $X2=2.44 $Y2=5.835 r66 2 35 200 $w=1.7e-07 $l=1.11781e-06 $layer=licon1_PDIFF $count=3 $X=2.3 + $Y=3.085 $X2=2.44 $Y2=4.135 r67 1 26 200 $w=1.7e-07 $l=2.81913e-06 $layer=licon1_PDIFF $count=3 $X=0.55 + $Y=3.085 $X2=0.69 $Y2=5.835 r68 1 23 200 $w=1.7e-07 $l=1.11781e-06 $layer=licon1_PDIFF $count=3 $X=0.55 + $Y=3.085 $X2=0.69 $Y2=4.135 .ends .subckt PM_SKY130_OSU_SC_18T_MS__XOR2_L%A_27_115# 1 2 9 13 17 21 25 29 32 33 35 c76 32 0 6.74854e-20 $X=1.805 $Y=2.765 c77 25 0 1.52002e-20 $X=1.72 $Y=2.225 r78 33 41 48.4159 $w=2.7e-07 $l=1.65e-07 $layer=POLY_cond $X=1.805 $Y=2.765 + $X2=1.805 $Y2=2.93 r79 32 33 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.805 + $Y=2.765 $X2=1.805 $Y2=2.765 r80 30 32 29.6845 $w=1.68e-07 $l=4.55e-07 $layer=LI1_cond $X=1.805 $Y=2.31 + $X2=1.805 $Y2=2.765 r81 29 37 48.4159 $w=2.7e-07 $l=1.65e-07 $layer=POLY_cond $X=0.845 $Y=2.225 + $X2=0.845 $Y2=2.06 r82 28 29 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.845 + $Y=2.225 $X2=0.845 $Y2=2.225 r83 26 35 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.345 $Y=2.225 + $X2=0.26 $Y2=2.225 r84 26 28 32.6203 $w=1.68e-07 $l=5e-07 $layer=LI1_cond $X=0.345 $Y=2.225 + $X2=0.845 $Y2=2.225 r85 25 30 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=1.72 $Y=2.225 + $X2=1.805 $Y2=2.31 r86 25 28 57.0856 $w=1.68e-07 $l=8.75e-07 $layer=LI1_cond $X=1.72 $Y=2.225 + $X2=0.845 $Y2=2.225 r87 21 23 155.273 $w=1.68e-07 $l=2.38e-06 $layer=LI1_cond $X=0.26 $Y=3.455 + $X2=0.26 $Y2=5.835 r88 19 35 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.26 $Y=2.31 $X2=0.26 + $Y2=2.225 r89 19 21 74.7005 $w=1.68e-07 $l=1.145e-06 $layer=LI1_cond $X=0.26 $Y=2.31 + $X2=0.26 $Y2=3.455 r90 15 35 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.26 $Y=2.14 $X2=0.26 + $Y2=2.225 r91 15 17 85.7914 $w=1.68e-07 $l=1.315e-06 $layer=LI1_cond $X=0.26 $Y=2.14 + $X2=0.26 $Y2=0.825 r92 13 41 848.628 $w=1.5e-07 $l=1.655e-06 $layer=POLY_cond $X=1.865 $Y=4.585 + $X2=1.865 $Y2=2.93 r93 9 37 505.074 $w=1.5e-07 $l=9.85e-07 $layer=POLY_cond $X=0.905 $Y=1.075 + $X2=0.905 $Y2=2.06 r94 2 23 150 $w=1.7e-07 $l=2.81181e-06 $layer=licon1_PDIFF $count=4 $X=0.135 + $Y=3.085 $X2=0.26 $Y2=5.835 r95 2 21 150 $w=1.7e-07 $l=4.2796e-07 $layer=licon1_PDIFF $count=4 $X=0.135 + $Y=3.085 $X2=0.26 $Y2=3.455 r96 1 17 91 $w=1.7e-07 $l=3.06186e-07 $layer=licon1_NDIFF $count=2 $X=0.135 + $Y=0.575 $X2=0.26 $Y2=0.825 .ends .subckt PM_SKY130_OSU_SC_18T_MS__XOR2_L%A 2 5 6 8 9 13 16 18 19 20 21 22 24 26 + 27 33 36 37 40 42 45 46 51 52 c122 33 0 3.28297e-19 $X=2.235 $Y=2.22 r123 50 51 28.4203 $w=2.7e-07 $l=7.5e-08 $layer=POLY_cond $X=0.845 $Y=2.935 + $X2=0.845 $Y2=3.01 r124 45 46 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.145 $Y=3.33 + $X2=2.145 $Y2=3.33 r125 40 58 15.6578 $w=1.68e-07 $l=2.4e-07 $layer=LI1_cond $X=1.085 $Y=3.33 + $X2=0.845 $Y2=3.33 r126 40 42 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.085 $Y=3.33 + $X2=1.085 $Y2=3.33 r127 37 42 0.103375 $w=2.3e-07 $l=1.45e-07 $layer=MET1_cond $X=1.23 $Y=3.33 + $X2=1.085 $Y2=3.33 r128 36 45 0.103375 $w=2.3e-07 $l=1.45e-07 $layer=MET1_cond $X=2 $Y=3.33 + $X2=2.145 $Y2=3.33 r129 36 37 0.741419 $w=1.7e-07 $l=7.7e-07 $layer=MET1_cond $X=2 $Y=3.33 $X2=1.23 + $Y2=3.33 r130 34 52 29.9935 $w=2.7e-07 $l=1.35e-07 $layer=POLY_cond $X=2.235 $Y=2.22 + $X2=2.235 $Y2=2.085 r131 33 34 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.235 + $Y=2.22 $X2=2.235 $Y2=2.22 r132 30 46 66.8717 $w=1.68e-07 $l=1.025e-06 $layer=LI1_cond $X=2.145 $Y=2.305 + $X2=2.145 $Y2=3.33 r133 29 33 5.87166 $w=1.68e-07 $l=9e-08 $layer=LI1_cond $X=2.145 $Y=2.22 + $X2=2.235 $Y2=2.22 r134 29 30 0.716491 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.145 $Y=2.22 + $X2=2.145 $Y2=2.305 r135 27 50 37.7695 $w=2.7e-07 $l=1.7e-07 $layer=POLY_cond $X=0.845 $Y=2.765 + $X2=0.845 $Y2=2.935 r136 26 27 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.845 + $Y=2.765 $X2=0.845 $Y2=2.765 r137 24 58 0.716491 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.845 $Y=3.245 + $X2=0.845 $Y2=3.33 r138 23 26 5.66838 $w=3.28e-07 $l=8.5e-08 $layer=LI1_cond $X=0.845 $Y=2.85 + $X2=0.845 $Y2=2.765 r139 23 24 25.7701 $w=1.68e-07 $l=3.95e-07 $layer=LI1_cond $X=0.845 $Y=2.85 + $X2=0.845 $Y2=3.245 r140 20 21 41.4471 $w=2e-07 $l=1.25e-07 $layer=POLY_cond $X=0.45 $Y=1.65 + $X2=0.45 $Y2=1.775 r141 18 52 16.5046 $w=1.5e-07 $l=1.35e-07 $layer=POLY_cond $X=2.1 $Y=2.085 + $X2=2.235 $Y2=2.085 r142 18 19 82.0426 $w=1.5e-07 $l=1.6e-07 $layer=POLY_cond $X=2.1 $Y=2.085 + $X2=1.94 $Y2=2.085 r143 14 19 26.9307 $w=1.5e-07 $l=1.06066e-07 $layer=POLY_cond $X=1.865 $Y=2.01 + $X2=1.94 $Y2=2.085 r144 14 16 479.436 $w=1.5e-07 $l=9.35e-07 $layer=POLY_cond $X=1.865 $Y=2.01 + $X2=1.865 $Y2=1.075 r145 13 51 506.1 $w=1.5e-07 $l=1.575e-06 $layer=POLY_cond $X=0.905 $Y=4.585 + $X2=0.905 $Y2=3.01 r146 10 22 5.30422 $w=1.5e-07 $l=1e-07 $layer=POLY_cond $X=0.55 $Y=2.935 + $X2=0.45 $Y2=2.935 r147 9 50 16.5046 $w=1.5e-07 $l=1.35e-07 $layer=POLY_cond $X=0.71 $Y=2.935 + $X2=0.845 $Y2=2.935 r148 9 10 82.0426 $w=1.5e-07 $l=1.6e-07 $layer=POLY_cond $X=0.71 $Y=2.935 + $X2=0.55 $Y2=2.935 r149 6 22 20.4101 $w=1.5e-07 $l=8.66025e-08 $layer=POLY_cond $X=0.475 $Y=3.01 + $X2=0.45 $Y2=2.935 r150 6 8 506.1 $w=1.5e-07 $l=1.575e-06 $layer=POLY_cond $X=0.475 $Y=3.01 + $X2=0.475 $Y2=4.585 r151 5 20 184.767 $w=1.5e-07 $l=5.75e-07 $layer=POLY_cond $X=0.475 $Y=1.075 + $X2=0.475 $Y2=1.65 r152 2 22 20.4101 $w=1.5e-07 $l=8.66025e-08 $layer=POLY_cond $X=0.425 $Y=2.86 + $X2=0.45 $Y2=2.935 r153 2 21 556.351 $w=1.5e-07 $l=1.085e-06 $layer=POLY_cond $X=0.425 $Y=2.86 + $X2=0.425 $Y2=1.775 .ends .subckt PM_SKY130_OSU_SC_18T_MS__XOR2_L%A_238_89# 1 2 9 12 14 17 21 25 29 31 r64 25 27 155.273 $w=1.68e-07 $l=2.38e-06 $layer=LI1_cond $X=2.87 $Y=3.455 + $X2=2.87 $Y2=5.835 r65 23 29 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.87 $Y=1.935 + $X2=2.87 $Y2=1.85 r66 23 25 99.1658 $w=1.68e-07 $l=1.52e-06 $layer=LI1_cond $X=2.87 $Y=1.935 + $X2=2.87 $Y2=3.455 r67 19 29 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.87 $Y=1.765 + $X2=2.87 $Y2=1.85 r68 19 21 61.3262 $w=1.68e-07 $l=9.4e-07 $layer=LI1_cond $X=2.87 $Y=1.765 + $X2=2.87 $Y2=0.825 r69 17 32 48.4159 $w=2.7e-07 $l=1.65e-07 $layer=POLY_cond $X=1.325 $Y=1.85 + $X2=1.325 $Y2=2.015 r70 17 31 48.4159 $w=2.7e-07 $l=1.65e-07 $layer=POLY_cond $X=1.325 $Y=1.85 + $X2=1.325 $Y2=1.685 r71 16 17 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.325 + $Y=1.85 $X2=1.325 $Y2=1.85 r72 14 29 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.785 $Y=1.85 + $X2=2.87 $Y2=1.85 r73 14 16 95.2513 $w=1.68e-07 $l=1.46e-06 $layer=LI1_cond $X=2.785 $Y=1.85 + $X2=1.325 $Y2=1.85 r74 12 32 1317.81 $w=1.5e-07 $l=2.57e-06 $layer=POLY_cond $X=1.265 $Y=4.585 + $X2=1.265 $Y2=2.015 r75 9 31 196.013 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=1.265 $Y=1.075 + $X2=1.265 $Y2=1.685 r76 2 27 150 $w=1.7e-07 $l=2.81913e-06 $layer=licon1_PDIFF $count=4 $X=2.73 + $Y=3.085 $X2=2.87 $Y2=5.835 r77 2 25 150 $w=1.7e-07 $l=4.34396e-07 $layer=licon1_PDIFF $count=4 $X=2.73 + $Y=3.085 $X2=2.87 $Y2=3.455 r78 1 21 91 $w=1.7e-07 $l=3.1225e-07 $layer=licon1_NDIFF $count=2 $X=2.73 + $Y=0.575 $X2=2.87 $Y2=0.825 .ends .subckt PM_SKY130_OSU_SC_18T_MS__XOR2_L%B 1 3 4 6 7 8 9 11 13 14 16 17 19 25 27 c56 27 0 6.74854e-20 $X=2.655 $Y=2.805 c57 13 0 1.52002e-20 $X=2.655 $Y=2.6 c58 8 0 1.7901e-19 $X=2.3 $Y=1.725 c59 7 0 1.49287e-19 $X=2.58 $Y=1.725 r60 26 27 20.0833 $w=3e-07 $l=1.25e-07 $layer=POLY_cond $X=2.53 $Y=2.805 + $X2=2.655 $Y2=2.805 r61 25 26 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.53 + $Y=2.765 $X2=2.53 $Y2=2.765 r62 21 25 12.7219 $w=1.68e-07 $l=1.95e-07 $layer=LI1_cond $X=2.53 $Y=2.96 + $X2=2.53 $Y2=2.765 r63 19 21 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.53 $Y=2.96 + $X2=2.53 $Y2=2.96 r64 14 27 18.9685 $w=1.5e-07 $l=2.05e-07 $layer=POLY_cond $X=2.655 $Y=3.01 + $X2=2.655 $Y2=2.805 r65 14 16 506.1 $w=1.5e-07 $l=1.575e-06 $layer=POLY_cond $X=2.655 $Y=3.01 + $X2=2.655 $Y2=4.585 r66 13 27 18.9685 $w=1.5e-07 $l=2.05e-07 $layer=POLY_cond $X=2.655 $Y=2.6 + $X2=2.655 $Y2=2.805 r67 12 17 20.4101 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=2.655 $Y=1.8 + $X2=2.655 $Y2=1.725 r68 12 13 410.213 $w=1.5e-07 $l=8e-07 $layer=POLY_cond $X=2.655 $Y=1.8 $X2=2.655 + $Y2=2.6 r69 9 17 20.4101 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=2.655 $Y=1.65 + $X2=2.655 $Y2=1.725 r70 9 11 184.767 $w=1.5e-07 $l=5.75e-07 $layer=POLY_cond $X=2.655 $Y=1.65 + $X2=2.655 $Y2=1.075 r71 7 17 5.30422 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=2.58 $Y=1.725 + $X2=2.655 $Y2=1.725 r72 7 8 143.574 $w=1.5e-07 $l=2.8e-07 $layer=POLY_cond $X=2.58 $Y=1.725 $X2=2.3 + $Y2=1.725 r73 4 26 49.0033 $w=3e-07 $l=3.94398e-07 $layer=POLY_cond $X=2.225 $Y=3.01 + $X2=2.53 $Y2=2.805 r74 4 6 506.1 $w=1.5e-07 $l=1.575e-06 $layer=POLY_cond $X=2.225 $Y=3.01 + $X2=2.225 $Y2=4.585 r75 1 8 26.9307 $w=1.5e-07 $l=1.06066e-07 $layer=POLY_cond $X=2.225 $Y=1.65 + $X2=2.3 $Y2=1.725 r76 1 3 184.767 $w=1.5e-07 $l=5.75e-07 $layer=POLY_cond $X=2.225 $Y=1.65 + $X2=2.225 $Y2=1.075 .ends .subckt PM_SKY130_OSU_SC_18T_MS__XOR2_L%Y 1 2 7 9 13 19 23 26 27 29 r58 31 32 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.565 $Y=1.48 + $X2=1.565 $Y2=1.48 r59 29 31 0.0784753 $w=2.23e-07 $l=1.4e-07 $layer=MET1_cond $X=1.425 $Y=1.48 + $X2=1.565 $Y2=1.48 r60 26 27 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.425 $Y=2.59 + $X2=1.425 $Y2=2.59 r61 21 26 0.0804477 $w=2.9e-07 $l=1.15e-07 $layer=MET1_cond $X=1.425 $Y=2.475 + $X2=1.425 $Y2=2.59 r62 21 23 0.0433297 $w=1.7e-07 $l=4.5e-08 $layer=MET1_cond $X=1.425 $Y=2.475 + $X2=1.425 $Y2=2.43 r63 20 29 0.0238602 $w=1.7e-07 $l=1.15e-07 $layer=MET1_cond $X=1.425 $Y=1.595 + $X2=1.425 $Y2=1.48 r64 20 23 0.804007 $w=1.7e-07 $l=8.35e-07 $layer=MET1_cond $X=1.425 $Y=1.595 + $X2=1.425 $Y2=2.43 r65 18 27 40.123 $w=1.68e-07 $l=6.15e-07 $layer=LI1_cond $X=1.425 $Y=3.205 + $X2=1.425 $Y2=2.59 r66 18 19 8.64139 $w=3.38e-07 $l=1.7e-07 $layer=LI1_cond $X=1.537 $Y=3.205 + $X2=1.537 $Y2=3.375 r67 13 15 80.671 $w=3.38e-07 $l=2.38e-06 $layer=LI1_cond $X=1.565 $Y=3.455 + $X2=1.565 $Y2=5.835 r68 13 19 2.71163 $w=3.38e-07 $l=8e-08 $layer=LI1_cond $X=1.565 $Y=3.455 + $X2=1.565 $Y2=3.375 r69 7 32 9.13816 $w=3.4e-07 $l=2.35e-07 $layer=LI1_cond $X=1.565 $Y=1.245 + $X2=1.565 $Y2=1.48 r70 7 9 14.2361 $w=3.38e-07 $l=4.2e-07 $layer=LI1_cond $X=1.565 $Y=1.245 + $X2=1.565 $Y2=0.825 r71 2 15 150 $w=1.7e-07 $l=2.86029e-06 $layer=licon1_PDIFF $count=4 $X=1.34 + $Y=3.085 $X2=1.565 $Y2=5.835 r72 2 13 150 $w=1.7e-07 $l=4.69201e-07 $layer=licon1_PDIFF $count=4 $X=1.34 + $Y=3.085 $X2=1.565 $Y2=3.455 r73 1 9 91 $w=1.7e-07 $l=3.44601e-07 $layer=licon1_NDIFF $count=2 $X=1.34 + $Y=0.575 $X2=1.565 $Y2=0.825 .ends