* Copyright 2020 The SkyWater PDK Authors * * Licensed under the Apache License, Version 2.0 (the "License"); * you may not use this file except in compliance with the License. * You may obtain a copy of the License at * * https://www.apache.org/licenses/LICENSE-2.0 * * Unless required by applicable law or agreed to in writing, software * distributed under the License is distributed on an "AS IS" BASIS, * WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. * See the License for the specific language governing permissions and * limitations under the License. * SKY130 Spice File. * statistics { * mismatch { * } * } * 4-terminal Vertical Parallel Plate Capacitor /w LI-M4 fingers and M5 Shield .subckt sky130_fd_pr__cap_vpp_44p7x23p1_pol1m1m2m3m4m5_noshield c0 c1 b mf=1 .param + ctot_a = '1.47e-12*sky130_fd_pr__cap_vpp_11p5x11p7_pol1m1m2m3m4m5_noshield_base__cor' + c0_sub = '5.17e-14*cli2s_vpp' + c1_sub = '4.86e-14*cli2s_vpp' + rat_m5 = 0.026 + rat_m4 = 0.1 + rat_m3 = 0.1 + rat_m2 = 0.259 + rat_m1 = 0.259 + rat_li = 0.18 + rat_py = 0.076 + cap_m5 = 'rat_m5*ctot_a' + cap_m4 = 'rat_m4*ctot_a' + cap_m3 = 'rat_m3*ctot_a' + cap_m2 = 'rat_m2*ctot_a' + cap_m1 = 'rat_m1*ctot_a' + cap_li = 'rat_li*ctot_a' + cap_py = 'rat_py*ctot_a' + lpy = '23.05-2*0.33-0.21' + ll1 = '23.05-2*0.33-0.21' + lm1 = '23.05-2*0.33-0.21' + lm2 = '23.05-2*0.33-0.21' + lm3 = '23.05-2*0.33-0.21' + lm4 = '23.05-2*0.33-0.21' + lm5 = '23.05-3*1.6' + wpy = 0.150 + wl1 = 0.140 + wm1 = 0.140 + wm2 = 0.140 + wm3 = 0.300 + wm4 = 0.300 + wm5 = 1.60 + nfpy = '32.28*4' + nfl1 = '41.25*4' + nfm1 = '41.25*4' + nfm2 = '41.25*4' + nfm3 = '19.52*4' + nfm4 = '19.52*4' + nfm5 = '4.07*4' + nvia4 = 2.0 + nvia3 = '28*4' + nvia2 = '10*4' + nvia = '20*4' + ncon = '31*4' + nlicon = '33*4' rsm5 z0 z2 'rm5*lm5/wm5*(1/3)*(1/nfm5)' cm5 z2 z1 'cap_m5' rvia4_0 z0 a0 'rcvia4/nvia4' rvia4_1 z1 a1 'rcvia4/nvia4' rsm4 a0 a2 'rm4*lm4/wm4*(1/3)*(1/nfm4)' cm4 a2 a1 'cap_m4' rvia3_0 a0 b0 'rcvia3/nvia3' rvia3_1 a1 b1 'rcvia3/nvia3' rsm3 b0 b2 'rm3*lm3/wm3*(1/3)*(1/nfm3)' cm3 b2 b1 'cap_m3' rvia2_0 b0 c0 'rcvia2/nvia2' rvia2_1 b1 c1 'rcvia2/nvia2' rsm2 c0 c2 '(rm2*lm2/wm2*(1/3)*(1/nfm2)+rm2*lm2/wm2)' cm2 c2 c1 'cap_m2' rvia_0 c0 d0 'rcvia/nvia' rvia_1 c1 d1 'rcvia/nvia' rsm1 d0 d2 'rm1*lm1/wm1*(1/3)*(1/nfm1)' cm1 d2 d1 'cap_m1' rcon1 d0 e0 'rcl1/ncon' rcon2 d1 e1 'rcl1/ncon' rli1 e0 e2 'rl1*ll1/wl1*(1/3)*(1/nfl1)' cli e2 e1 'cap_li' rlicon1 e0 f0 'rcp1/nlicon' rlicon2 e1 f1 'rcp1/nlicon' rpy1 f0 f2 'rp1*lpy/wpy*(1/3)*(1/nfpy)' cpy f2 f1 'cap_py' cpy2b_0 f0 b 'c0_sub' cpy2b_1 f1 b 'c1_sub' .ends sky130_fd_pr__cap_vpp_44p7x23p1_pol1m1m2m3m4m5_noshield