* Copyright 2020 The SkyWater PDK Authors * * Licensed under the Apache License, Version 2.0 (the "License"); * you may not use this file except in compliance with the License. * You may obtain a copy of the License at * * https://www.apache.org/licenses/LICENSE-2.0 * * Unless required by applicable law or agreed to in writing, software * distributed under the License is distributed on an "AS IS" BASIS, * WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. * See the License for the specific language governing permissions and * limitations under the License. * SKY130 Spice File. * statistics { * mismatch { * } * } * 4-terminal Vertical Parallel Plate Capacitor /w LI-M4 fingers and M5 Shield * 3-terminal Vertical Parallel Plate Capacitor /w M1-M4 fingers and No Shield * Layout: sky130_fd_pr__cap_vpp_11p5x11p7_m1m4_noshield .subckt sky130_fd_pr__cap_vpp_11p5x11p7_m1m4_noshield c0 c1 b + .param mult = 1 presim_flag = 0.0 + + ctot_a = {110.19e-15*sky130_fd_pr__cap_vpp_11p5x11p7_m1m2m3m4_shieldl1m5__cor+0.0283/sqrt(11.5*11.7*2*mult)*110.19e-15*sky130_fd_pr__cap_vpp_11p5x11p7_m1m2m3m4_shieldl1m5__cor*sky130_fd_pr__model__cap_vpp_only_p__slope} + c02s = {(4.33+presim_flag*0.54)*1e-15*cli2s_vpp} + c12s = {1.87e-15*cli2s_vpp} + rat_m4 = 0.1426 + rat_m3 = 0.1426 + rat_m2 = 0.3585 + rat_m1 = 0.3563 + cap_m4 = {rat_m4*ctot_a} + cap_m3 = {rat_m3*ctot_a} + cap_m2 = {rat_m2*ctot_a} + cap_m1 = {rat_m1*ctot_a} + lm1 = 5.215 + lm2 = 5.095 + lm3 = 5.050 + lm4 = 4.910 + wm1 = 0.140 + wm2 = 0.140 + wm3 = 0.300 + wm4 = 0.300 + nfm1 = 72.0 + nfm2 = 72.0 + nfm3 = 34.0 + nfm4 = 34.0 + nvia3_c0 = 103.0 + nvia3_c1 = 49.0 + nvia2_c0 = 104.0 + nvia2_c1 = 49.0 + nvia_c0 = 124.0 + nvia_c1 = 62.0 rsm4 a0 a2 r = {rm4*lm4/wm4*(1/3)*(1/nfm4)} cm4 a2 a1 c = {cap_m4} rvia3_0 a0 b0 r = {rcvia3/nvia3_c0} rvia3_1 a1 b1 r = {rcvia3/nvia3_c1} rsm3 b0 b2 r = {rm3*lm3/wm3*(1/3)*(1/nfm3)} cm3 b2 b1 c = {cap_m3} rvia2_0 b0 c0 r = {rcvia2/nvia2_c0} rvia2_1 b1 c1 r = {rcvia2/nvia2_c1} rsm2 c0 c2 r = {rm2*lm2/wm2*(1/3)*(1/nfm2)} ccmvpp11p5x11p7_m1m4 c2 c1 c = {cap_m2} rvia_0 c0 d0 r = {rcvia/nvia_c0} rvia_1 c1 d1 r = {rcvia/nvia_c1} rsm1 d0 d2 r = {rm1*lm1/wm1*(1/3)*(1/nfm1)} cm1 d2 d1 c = {cap_m1} c0_sub d0 b c = {c02s} c1_sub d1 b c = {c12s} .ends sky130_fd_pr__cap_vpp_11p5x11p7_m1m4_noshield